EUV lithography systems – Products - ASML
Providing high resolution in high-volume manufacturing, ASML’s extreme ultraviolet (EUV) lithography systems are pushing Moore’s Law forward. Discover our NXE systems that use EUV light to deliver high-resolution lithography and make mass production of the world’s most advanced microchips possible.
Making EUV: from lab to fab – Stories - ASML
Mar 30, 2022 · Four decades, billions in R&D, a vital merger, thousands of people around the world: bringing EUV lithography to high-volume manufacturing was an immense effort. Learn about the pivotal moments that happened on the way to launching ASML’s first EUV system, as well as a glimpse of what’s next.
5 things you should know about High NA EUV lithography - ASML
Jan 25, 2024 · High NA EUV is the next step in our constant pursuit of shrink. Like NXE systems, it uses EUV light to print tiny features on silicon wafers. And by turning the NA knob, we deliver even better resolution: The new platform, known as EXE, offers chipmakers a CD of 8 nm.
Light & lasers - Lithography principles| ASML
EUV lithography, a technology entirely unique to ASML, uses light with a wavelength of 13.5 nanometers. This wavelength is more than 14 times shorter than DUV light. EUV light occurs naturally in outer space. But to make EUV lithography possible, we needed to engineer a way to create such light within a system.
Indistinguishable from magic: the EUV pellicle – Stories - ASML
Sep 14, 2022 · The pellicle is one of the breakthroughs that enabled EUV (extreme ultraviolet) lithography in high-volume microchip manufacturing. In this story, three physicists describe how ASML researched this ‘impossible’ technology and brought it to market.
EUV light source engineers win Leibinger international award - ASML
Oct 22, 2021 · Three ASML engineers at the forefront of developing the EUV light source – a revolution in photolithography – have received the prestigious Leibinger international award. Hear the story of three engineers who achieved the impossible, increasing EUV source power for high-volume manufacturing.
Cymer | ASML - Supplying the semiconductor industry
Cymer is an independently operated business within the ASML group that develops, manufactures and services deep-ultraviolet (DUV) light sources. ASML acquired Cymer in 2013 to accelerate the development of extreme ultraviolet (EUV) semiconductor lithography.
ASML San Diego - Locations
17075 Thornmint Court San Diego, California 92127 United States (858) 385-7300. ASML San Diego is the epicenter for DUV and EUV light source development in the US as well as the main office of Cymer.
TWINSCAN NXE:3800E – EUV lithography systems - ASML
ASML’s TWINSCAN NXE:3800E is a dual-stage extreme ultraviolet (EUV) system that supports high-volume manufacturing of 2 nm Logic nodes and leading-edge DRAM nodes.
What have materials got to do with it? – Stories - ASML
Oct 20, 2022 · ASML’s lithography machines use ultraviolet light to ‘print’ patterns on silicon wafers that form the basis of a microchip. In our EUV machines, the light is generated in a special way: by firing laser pulses at droplets of tin to vaporize them into a plasma that emits EUV light.
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